Study on room temperature gas-sensing performance of CuO film-decorated ordered porous ZnO composite by In2O3 sensitization
Abstract
For the first time, ordered mesoporous ZnO nanoparticles have been synthesized by a template method. The electroplating after chemical plating method was creatively used to form copper film on the surface of the prepared ZnO, and then a CuO film-decorated ordered porous ZnO composite (CuO/ZnO) was obtained by a high-temperature oxidation method. In2O3 was loaded into the prepared CuO film–ZnO by an ultrasonic-assisted method to sensitize the room temperature gas-sensing performance of the prepared CuO/ZnO materials. The doped In2O3 could effectively improve the gas-sensing properties of the prepared materials to nitrogen oxides (NOx) at room temperature. The 1% In2O3 doped CuO/ZnO sample (1 wt% In2O3–CuO/ZnO) showed the best gas-sensing properties whose response to 100 ppm NOx reached 82%, and the detectable minimum concentration reached 1 ppm at room temperature. The prepared materials had a good selectivity, better response, very low detection limit, and high sensitivity to NOx gas at room temperature, which would have a great development space in the gas sensor field and a great research value.
1. Introduction
In recent years, environmental monitoring gas sensors have attracted great attention. Gas sensors can detect various inflammable, explosive, toxic, and harmful gases accurately and effectively. The development of efficient, low cost, highly sensitive, highly selective and convenient chemical sensors can precisely recognize and measure the presence of toxic gases and human exposure levels, which have become a significant endeavour for the well-being and welfare of people, safety and process control in industrial applications [1]. As gas-sensing materials, metal oxide semiconductors (MOS) have promising applications in monitoring air pollution, detecting toxic/explosive gases etc. which have been widely investigated, and have become a hotspot [2,3]. The metal oxide-based gas sensors are used widely for the detection of toxic gaseous species not only because of their superior thermal and physical stability but also due to their ability to detect very low gas concentrations [4]. Many attempts have been made to enhance the sensitivity or selectivity of oxide nanomaterials by surface modification, metal-doping, loading and the use of core shell structures [5–7].
Among various kinds of developed oxide gas-sensing materials, ZnO has attracted great attention. ZnO is a functional n-type semiconductor, which has been considered as an essential semiconductor gas-sensing material because of its high chemical stability, suitability to doping, harmlessness and economic nature [8,9]. However, pure ZnO has some inherent disadvantages, including low sensitivity, high working temperature, long response and recovery time etc. which may prevent its further development [10]. Micro/nanostructured MOS have received much attention because they have high sensitivity to small concentration of gases, low fabrication cost, long-term stability and low power consumption [11]. It is known that the morphology has a great influence on the gas-sensing properties of materials, and current researches are focused on obtaining special morphology and structure of ZnO nanomaterials by different means. Lots of different morphological ZnO and ZnO-based composite have been prepared, such as ZnO nanoflakes [12], ZnO nanowires [13], ZnO micro-flowers [14], porous ZnO micro-sheets [15], ZnO-decorated Fe2O3 [16] and so on.
CuO is a p-type semiconductor with a low band gap of 1.2–2.0 eV, and its p-type characteristic provides a route to form p–n junctions with n-type metal oxides [17]. CuO has been used successfully to detect H2S using a range of p–n composite nanostructures [18–20]. Composite type sensor using two or multiple oxide material in single or multiple layers is an effective way to enhance the selectivity of the sensors. Various authors have reported selective and sensitive gas-sensing characteristics of composite oxide material. ZnO and CuO composites have been reported in gas sensing. Combination of one-dimensional ZnO and CuO microstructure may also exhibit enhanced gas-sensing property [18,21]. Rai et al. [22] reported the modulation of ZnO nanorod electronic properties through CuO nanoparticles and the use of functionalized ZnO nanorods for CO sensing applications. A wet chemical technique was used to prepare CuO-doped ZnO semiconductor nanomaterials with nearly controlled rod shape structure [23].
The gas-sensing properties of materials are closely related with the density and species of surface adsorptive gases. Therefore, for high performances of gas-sensitive materials they need to have a larger Brunauer--Emmett--Teller (BET) surface area. Late et al. [24] presented a comprehensive overview of recent developments in the application of two-dimensional (2D) layered inorganic nanomaterials as sensors, and they did a lot of works in the 2D layered sensor materials field which included the large-area MoS2 sheets gas sensor [25], 2D WS2-based sensor [26,27], single-layer MoSe2-based gas sensor [28], SnSe2 nanosheets sensor [29] and 2D black phosphorus sensor [30,31]. Porous materials have a much bigger BET surface area and much stronger gas adsorption ability, which greatly improve the gas-sensing performance of the porous materials. Porous ZnO nano/microstructures have also drawn extensive research attention. Specifically, the introduction of pores into ZnO nano/microstructures facilitates the gas diffusion and mass transport, enormously improving gas sensor performance [32]. Liu et al. [33] reported the synthesis of three-dimensional hierarchical ZnO porous structures functionalized by Au. Wang et al. [34] reported a facile approach to prepare nest-like three-dimensional porous ZnO with hierarchically 2D lamellar structures. The nest-like ZnO hierarchically porous structures displayed a superior gas-sensing performance. Liu et al. [35] reported the synthesis of single-crystalline porous ZnO nanosheets by annealing ZnS (ethylenediamine) complex precursor, which exhibited highly sensitive performance. Huang et al. [36] reported tunable macro–mesoporous ZnO (M/m-ZnO) nanostructures, and the prepared M/m-ZnO nanostructures demonstrated better ethanol and acetone sensing properties. Template and template-free mesoporous ZnO-based structures have been widely prepared as gas materials [37].
In this study, ordered mesoporous ZnO nanoparticles have been synthesized by a template method. The electroplating after chemical plating method was creatively used to form copper film on the porous ZnO surface, and then a CuO film-decorated ordered porous ZnO composite (CuO film–ZnO) was obtained by a high-temperature oxidation method. In2O3 was loaded in the prepared CuO film–ZnO by ultrasonic-assisted method to sensitize the room temperature gas-sensing performance of the prepared materials. The fluffy porous structure was helpful for gas diffusion and surface reaction, which led to the sensor exhibiting faster response. The copper film was more uniform when the electroplating after chemical plating method was used to form copper film, and the n–p heterojunction between CuO film and ZnO matrix played an important role in the enhancement of the sensor response and selectively. The In2O3 played a sensitizer role to sensitize the surface reaction. In2O3 was a catalyst, it reduced the activation energy of the oxidation–reduction reaction on the surface of composites, efficiently separated the oxygen molecules, improved the activity of gas-sensitive materials, increased the free electron amount and expedited the reaction rate. As such, the gas sensitivity of the composites was enhanced. The prepared material greatly reduced the working temperature of the sensor, which would have a great development prospect and great research value in the sensor field.
2. Experimental
2.1. Materials
All chemicals used in our work were of analytical grade, and used without any further purification. Cetyltrimethylammonium bromide (CTMAB, A.R.) was purchased from Changzhou Xinhua Reagent Research Institute in China. Zn(Ac)2·2H2O was purchased from Tianjin Guangfu Fine Chemical Research Institute in China. Sodium hydroxide (NaOH, A.R.) was purchased from Beijing Chemical Works Research Institute in China. Potassium sodium tartrate tetrahydrate (C4H4O6KNa·4H2O, A.R.) was purchased from Tianjin Guangfu Technology Development Co. Ltd in China. Formaldehyde solution (HCHO, A.R.) was purchased from Tianjin Fuchen Chemical Reagents Factory in China. Ethylene diamine tetraacetic acid disodium (EDTA-2Na, A.R.) was purchased from Shenyang Reagent Factory in China. Copper(II) sulfate pentahydrate (CuSO4·5H2O, A.R.) was purchased from Sinopharm Chemical Reagent Co. Ltd in China. Ethanol and deionized water were used for all processes of washing and dissolution.
2.2. Preparation of materials
2.2.1. Preparation of mesoporous ZnO nanoparticles
One gram of CTMAB was added into 480 ml of deionized water, and the mixture was vigorously stirred until the solution was homogeneous at 80°C. About 4.92 g of Zn(Ac)2· 2H2O was dissolved into the solution with stirring. The pH of the solution was adjusted with LiOH to alkaline; the reaction then proceeded at 80°C for 2 h. The product was filtered, washed with deionized water and dried at room temperature to get the powder sample. The original sample was calcined at 500°C for 4 h, and the ordered mesoporous ZnO material was finally obtained.
2.2.2. Preparation of CuO film on the mesoporous ZnO matrix
The electroless plating solution was prepared according to table 1. The prepared ordered porous ZnO material was added into the electroless plating solution, which was reacted for 1 h under vigorous stirring. The powder was filtered, washed with deionized water and dried to afford a reddish brown powder with metallic lustre.
| reagents | CuSO4.5H2O | HCHO | EDTA-2Na | sodium potassium tartrate | potassium ferrocyanide | dipyridyl | NaOH |
|---|---|---|---|---|---|---|---|
| concentration | 25 g l−1 | 20–40 g l−1 | 20–40 g l−1 | 10–20 g l−1 | 10 mg l−1 | 10 mg l−1 | 20% |
The prepared powder was put into semipermeable membrane, and the negative pole was inserted into the powder. The powder was immersed in the plating solution (table 2). The sheet copper was used as anode, voltage was regulated at 17 V, electricity was regulated at 1 A and the plating solution was electrified for 1 h. The powder was filtered, washed with deionized water, dried, calcined at 500°C for 4 h to afford a black CuO film–ZnO powder sample.
| reagents | CuSO4.5H2O | NaOH | citric acid | sodium potassium tartrate | deionized water |
|---|---|---|---|---|---|
| amount | 13 g | 31.25 g | 50 g | 10 g | 250 ml |
2.2.3. Preparation of In2O3 sensitization CuO film–ZnO composite material
In order to study the effect of different In2O3 decoration amounts on the gas-sensing performance, a series of In2O3 decorated CuO film–ZnO composites were synthesized. In a typical procedure, 0.1 g prepared CuO film–ZnO product was dispersed in 20 ml deionized water with the aid of ultrasonication. A certain amount of In(NO3)3 (In(NO3)3 concentration: 10 wt%, 15 wt%, 20 wt% and 25 wt%) was added in the above solution. The reaction system was dispersed in ultrasonic for 10 min, and the suspension liquid was aged for 2 h at room temperature. The suspension liquid was filtered, washed with deionized water and dried for 10 h at 60°C. The prepared samples were heated for 4 h at 500°C with a warming rate of 2°C min−1 to afford the products. The In-loaded contents were obtained with an inductively coupled plasma–optical emission spectrometer (ICAP 6000 Series), and the corresponding doping contents of In2O3 were calculated which were 0.5, 1, 3 and 6 wt%, respectively.
2.3. Characterization
Powder X-ray diffraction (XRD) patterns were collected with a Siemens D5005 diffractometer using Cu–Kα radiation (λ = 1.5418 Å and operating at 30 kV and 20 mA). Transmission electron microscopy (TEM) images were taken with a JEOL 2010 TEM instrument. The scanning election microscopy (SEM) images were taken with a JEOL JSM-5600 L. Physical adsorption of nitrogen was performed with a Micromeritics ASAP2010M volumetric adsorption analyser at 77 K. A sample was degassed in vacuum at 573 K for 12 h before measurement. Surface area was calculated based on the BET model, while pore size was computed using the Barrett–Joyner–Halenda method.
2.4. The preparation of gas sensor
In this study, an interdigitated Au electrode was selected for the gas-sensing detection. The sample was disposed as follows: about 3 mg of the prepared sample was dispersed in ethanol, which was dispersed ultrasonically for about 20 min. The sample material was spin-coated on the interdigitated electrode surface to form a thin film, which was dried to obtain the gas sensor. The parameters of interdigitated gold electrode and schematic diagram of the prepared gas sensor are shown in figure 1.
Figure 1. Parameters of interdigitated gold electrode and schematic diagram of the prepared gas sensor.

The sensor was welded onto a socket, and the electrical properties of the sensor were measured by a JF02E intelligent gas-sensing analysis system. The sensor response was defined as
3. Results and discussion
3.1. Structure and morphology
Figure 2 shows the wide-angle XRD pattern of the prepared ordered mesoporous 1 wt% In2O3–CuO/ZnO sample. The sharp diffraction peaks indicated the highly crystalline characteristic of 1 wt% In2O3–CuO/ZnO samples. All of the diffraction peaks were consistent with the standard card of CuO (JCPDS No. 44-0706), which showed that the CuO has been deposited on the surface of the ZnO. The diffraction peaks of wurtzite ZnO (JCPDS No. 36-1451) could be seen in the prepared material. In the XRD pattern, the characteristic peaks of the In2O3 could also be seen. It showed that the In2O3 has been doped into the prepared CuO film–ZnO matrix material.
Figure 2. Wide-angle XRD pattern of the 1 wt% In2O3–CuO/ZnO sample.

Figure 3 shows the energy-dispersive X-ray spectra of CuO/ZnO and 1 wt% In2O3–CuO/ZnO samples. From figure 3a, the peaks of C, Zn, O, Si and Cu could be seen in CuO/ZnO sample. The sample was first placed on a silicon wafer when the sample was tested, which led to the highest Si content peak. The C and O were mainly from the conducting resin. In figure 3b, the indium (In) content peaks could be seen in 1 wt% In2O3–CuO/ZnO sample, which could prove the existence of the In2O3 in 1 wt% In2O3–CuO/ZnO sample, and the In2O3 has been successfully assembled into the CuO film–ZnO matrix. The Pt content peak was attributed to the Pt conductive agent sprayed on the surface of the sample. There were no peaks of other elements in samples, which indicated that the prepared samples were pure.
Figure 3. Energy-dispersive X-ray spectra of the (a) CuO/ZnO sample and (b) 1 wt% In2O3–CuO/ZnO sample.

Figure 4 shows the SEM image of CuO film–ZnO and 1 wt% In2O3–CuO/ZnO samples. From figure 4a, the CuO/ZnO sample showed a whole flower-like appearance, whose surface was smooth. From figure 4b, the 1 wt% In2O3–CuO/ZnO sample showed an analogous flower-like structure, which obtained from the petals of flower-like CuO/ZnO sample fallen off, the analogous flower-like structures were heaped with irregular flaky grain.
Figure 4. SEM images of the (a) CuO/ZnO and (b) 1% In2O3–CuO/ZnO sample.

Figure 5a shows the TEM image of the 1 wt% In2O3–CuO/ZnO sample, which was taken parallel to the direction of the channels. From figure 5a, it could be seen that there were a lot of ordered pores in the sample. Figure 5b shows the high-resolution TEM (HRTEM) image of the 1% In2O3–CuO/ZnO sample. From figure 5b, it could be seen that the lattice fringes of the sample were very clear, which were the lattice fringes of CuO. In the HRTEM images, the ordered pores could be very clearly seen under the CuO lattice fringes, which indicated that the CuO thin films were formed on the surface of the prepared sample.
Figure 5. (a) TEM image and (b) HRTEM image of the 1 wt% In2O3–CuO/ZnO sample.

3.2. Gas-sensing performance
Figure 6a shows the gas response bar charts of different In2O3-doped concentration samples to different concentrations of NOx. The study found that the sensitivity of each sample decreased when NOx concentration decreased from 100 to 5 ppm. The results showed that In2O3 could significantly enhance the response of the materials to NOx, and the 1 wt% In2O3–CuO/ZnO sample had the best response to NOx among five prepared (0, 0.5, 1, 3, 6 wt%) In2O3–CuO/ZnO sensor samples in this study. At room temperature, the response and response time of the sensors with different In2O3 contents to 100 ppm NOx gas are shown in the electronic supplementary material, table S1.
Figure 6. (a) Gas response bar charts of different In2O3-doped concentration samples to different concentrations of NOx; (b) dynamic response–recovery curves of 1 wt% In2O3–CuO/ZnO sample; (c) response and response time curve of the 1 wt% In2O3–CuO/ZnO sample to different concentrations of NOx; (d) gas response bar charts of 1 wt% In2O3–CuO/ZnO sample to 100 ppm different gases.

Under the current operating conditions, the response–recovery curves of 1 wt% In2O3–CuO/ZnO sensor are shown in figure 6b. The resistance sharply decreased when the NOx gas was injected, and the resistance recovered to its initial value when the NOx gas was discharged. When the prepared sensor was in air, oxygen molecules were adsorbed on the surface of the sensor; the adsorbed oxygen captured electrons from the conductance band to produce negatively charged oxygen species. These chemisorbed oxygen species would act as surface acceptors, trapping electrons and increasing surface resistance of the sensor. When the NOx gas was injected, the NOx would react with the formed oxygen ions, which released the trapped electrons back to the sensor surfaces, and the resistance of the sensor was sharply decreased. It indicated that the prepared sensing material was a p-type semiconductor material.
Figure 6c shows the response and response time curve of the 1 wt% In2O3–CuO/ZnO sample to 100–1 ppm NOx at room temperature. When the NOx gas was injected into the sensing chamber, the resistance of the 1 wt% In2O3–CuO/ZnO sensor rapidly decreased, and reached the minimum resistance value in a short time. The 1 wt% In2O3–CuO/ZnO sensor exhibited a fast and reversible response to NOx, the response time being only 7 s to 100 ppm NOx which was much shorter than that reported in a lot of literature [26,39,41–43], and the corresponding response reached up to 82%. The responses were weakened with the reduction in the NOx concentration from 100 to 1 ppm, and the corresponding response time increased. It was related to the gas concentration, gas diffusion and adsorption on the surface of the nanomaterials. With decreasing of NOx concentration, the NOx gas partial pressure declined in the reaction chamber which led to gas phase reaction velocity being slower, and the response time increased. It is worth noting that the minimum detection limit of 1 wt% In2O3–CuO/ZnO gas sensor was only 1 ppm at room temperature, the corresponding response still reached 17% and the corresponding response time was 136 s.
In order to study the selectivity of 1 wt% In2O3–CuO/ZnO gas sensor, the responses of 1 wt% In2O3–CuO/ZnO sensor to different gases (NOx, NH3, O2, CO and H2) were measured at room temperature. The corresponding test results are shown in figure 6d. The 1 wt% In2O3–CuO/ZnO gas sensor had a relatively high response to NH3. When the NH3 concentration was 100 ppm, the response reached 48%. However, the response to NH3 of the sensor was also significantly lower than the response to the same concentration of NOx. The response of other gases (O2, CO and H2) was closer to 0%. The experimental results showed that the 1 wt% In2O3–CuO/ZnO gas sensor had good selectivity.
The humidity is one of the significant factors in the gas-sensing process, and the degree of humidity influences the sensing performance of oxide semiconductors. However, the humidity has little effect on NOx gas response in this study. The result is shown in figure 7.
Figure 7. Influence of the humidity on the gas responses of 1 wt% In2O3–CuO/ZnO sample.

Figure 8 shows the stability bar charts of 1 wt% In2O3–CuO/ZnO sample. The response of the prepared sample remained stable after six months. It indicated that the prepared 1 wt% In2O3–CuO/ZnO sample had good stability.
Figure 8. Stability bar charts of 1 wt% In2O3–CuO/ZnO sample.

3.3. Discussion of sensing mechanism
The gas-sensing behaviour of ZnO results from the surface chemical reactions. The reactants are the chemisorbed oxygen species (O−, O2− and O2−) and the adsorbed target gas molecules. These reactions lead to the resistance variation of the gas sensor. Generally, the n-type oxide semiconductor materials (such as ZnO) response mechanism involves the interaction between the detected gases and chemisorbed oxygen ions on the surface of the materials, leading to the resistance change of the sensor [44,45]. In air, the oxygen molecules adsorb on the surface of the materials, which can capture free electrons from the materials to form negative oxygen ions (O2−, O− and O2−) at grain boundaries, and a thick space charge layer will be formed. The negative surface charges will generate a higher surface potential barrier, which leads to a high electrical resistance [46,47]. The process can be expressed as follows:
Also, the target gases NO2 and NO directly adsorb on the sensor, which react with O− and generate bidentate NO3− (s) and NO2−, and release the trapped electrons back into the conduction band. The process can be expressed as follows [48]:
The higher sensitivity of CuO/ZnO composite can be attributed to the electronic sensitization induced by CuO [50,51]. There are more active sites and more chemisorbed oxygen species on the surface of p-type semiconductors than n-type semiconductors [51,52]. The modified CuO nanostructures can act as a strong acceptor of electrons from ZnO [50]. The Fermi energy levels of n-type ZnO and p-type CuO are equalized which is due to the charge transfer [53,54]. The introduction of CuO film on the surface of the porous ZnO increases the carrier density of the ZnO, which results in the electron redistribution between the ZnO and the CuO [55]. In the air, oxygen molecules capture electrons from CuO, and chemisorbed oxygen species are formed on its surface [56]. Meanwhile, electrons transfer from ZnO to CuO, which causes the formation of an electron depletion layer (EDL) extending into ZnO [51]. The EDL significantly narrows the conducting part and dominates the conductivity of CuO/ZnO [57,58]. The decoration of CuO promotes the chemisorption of oxygen species and the chemical reactions on the surface of CuO/ZnO [51,59]. This leads to an enhancement in the sensitivity of CuO/ZnO composite [60].
In addition, high specific surface area of sensing material usually has positive effects on the sensing response [61]. The porous structure helps to increase the gas-sensing performance. The porous structure provides abundant pores, which is more beneficial to diffusion of gas molecules [62,63]. Moreover, it also provides more active sites, and improves the kinetics of chemical reactions on the surface [63]. This also results in enhanced sensing performance. Furthermore, there would be more oxygen species chemisorbed on the surface of CuO film structures due to its large surface to volume ratio [64]. Thus, the sensitivity of the CuO/ZnO composite is further enhanced. In this study, CuO is introduced onto the surface of ordered mesoporous zinc oxide by electrodeposition after chemical deposition method. The active site density is improved by the advantages of porous and large specific surface area of mesoporous materials. CuO is dispersed on the porous surface of the mesoporous ZnO matrix material to provide an effective gas diffusion channel for CuO contacting with the gas. The provided multiple active sites make NOx easier to react with adsorbed oxygen ions on the surface, which increases gas sensitivity performance.
On the surface of the prepared CuO/ZnO composite, the heterogeneous structure can be formed between CuO and ZnO by ultrasonic method, and the gas-sensitive properties can be enhanced by In2O3. Generally, the n–n (or p–n) type heterojunction-based interfacial barriers between In2O3 and ZnO (or CuO) nanocrystals are another mechanism accounting for the enhanced sensing performance [45,65–67]. In this study, the doping content is very little which forms discontinuity phase. A possible gas-sensing mechanism is as follows: in the band of interfaces, there is a spike at the In2O3 side along with a notch at the host side. The discontinuity band sets barriers for electrons in both conduction band and valence band. The heterojunction interfacial barriers can strongly modify the charge transport behaviours of carriers because the carrier concentration varies exponentially with the barrier height. Further studies are required to determine the mechanism through which the In2O3-doped semiconductor interfacial barriers promote the sensing performance towards gases [68]. Also, the catalysis of the In2O3 should not be overlooked. The catalytic activity of In2O3 accelerates the dissociation of oxygen molecules, and causes a spillover of the adsorbed oxygen ions on the surface of 1% In2O3–CuO/ZnO composite. More adsorbed oxygen ions provide more sensing activity sites and shows high response [45,69–71]. In this study, the doped quantity In2O3 is very little, the p–n heterojunction or n–n/p–p homo-type heterojunction cannot be formed, and the In2O3 only plays a role of sensitizer to sensitize the surface reaction. With the In2O3 content increasing, the sensitization is enhanced. But, the sensitized mechanism is changed when the doped In2O3 quantity exceeded the limit, which can be explained with heterojunction mechanism, and the response of the sensor will be the lower when the In2O3 content is not enough to form the continuous heterojunction.
In this study, the remarkable gas-sensing performance of the prepared 1 wt% In2O3–CuO/ZnO sensor may be for the following reasons. First, the fluffy porous structure is helpful for gas diffusion and surface reaction, which lead to the sensor exhibiting faster response. Second, n–p heterojunction between CuO and ZnO plays an important role in the enhancement of the sensor response and selectively. The CuO has a lower Fermi level than ZnO, and ZnO would receive electrons from CuO, leading to the formation of an accumulation layer at the CuO/ZnO interface. The increase in electrons on the surface of ZnO is able to facilitate adsorption of oxygen molecules and a decrease in resistance. Third, the doping of In2O3 is also helpful for remarkable gas-sensing performance of 1 wt% In2O3–CuO/ZnO composite. The reasons include electron interactions between In2O3 and ZnO, the catalytic activity of In2O3 accelerates the dissociation of oxygen molecules, and causes a spillover of the adsorbed oxygen ions on the surface of 1 wt% In2O3–CuO/ZnO composite. More adsorbed oxygen ions provide more sensing sites, and show high response. The mechanism is intuitively explained in figure 9.
Figure 9. A schematic diagram of sensing mechanism of 1 wt% In2O3–CuO/ZnO sensor.

4. Conclusion
An ordered mesoporous ZnO nanomaterial has been synthesized by a template method. The prepared porous ZnO nanomaterial is used as matrix to prepare a porous Cu film–ZnO composite by the electroplating after chemical plating method, and finally a CuO film-decorated ordered porous ZnO composite is obtained by a high-temperature oxidation method. Then, In2O3 is loaded into the prepared CuO/ZnO by an ultrasonic-assisted method, affording an In2O3–CuO/ZnO composite. The prepared 1 wt% In2O3–CuO/ZnO composite shows the best gas-sensing performance, in which the In2O3 doping content is only 1 wt%. For 1 wt% In2O3–CuO/ZnO sample, its response time is only 7 s to 100 ppm NOx, and the corresponding response reaches 82%. It is worth noting that the minimum detection limit of 1 wt% In2O3–CuO/ZnO gas sensor was only 1 ppm at room temperature, the corresponding response still reached 17% and the corresponding response time was 136 s. The response of the 1 wt% In2O3–CuO/ZnO gas sensor is much higher, the minimum detection limit is much lower, the selectivity and stability are much better and the corresponding response time is much shorter at room temperature than that reported in a lot of literature.
Data accessibility
All relevant data are within the paper and the electronic supplementary material files.
Authors' contributions
T.-t.L. wrote the manuscript. N.B. conducted the experiments. A.-f.G. revised the manuscript. H.Y. conceived and designed the project. Y.Y. and X.-t.D. discussed the results and sensing mechanism. All authors gave final approval for publication.
Competing interests
We declare we have no competing interests.
Funding
We gratefully acknowledge the support of the work by the National Natural Science Foundation of China (grant no. 51572034), the National Natural Science Foundation of China (grant no. 21601018) and the National Natural Science Foundation of Changchun University of Science and Technology (no. XQNJJ-2015-07).
Footnotes
References
- 1
Kimura M, Sakai R, Sato S, Fukawa T, Ikehara T, Maeda R, Mihara T . 2012Sensing of vaporous organic compounds by TiO2 porous films covered with polythiophene layers. Adv. Funct. Mater. 22, 469–476. (doi:10.1002/adfm.201101953) Crossref, ISI, Google Scholar - 2
Rai P, Raj S, Ko KJ, Park KK, Yu YT . 2013Synthesis of flower-like ZnO microstructures for gas sensor applications. Sens. Actuat. B Chem. 178, 107–112. (doi:10.1016/j.snb.201212031) Crossref, ISI, Google Scholar - 3
Flak D, Braun A, Mun BS, Park JB, Parlinska-Wojtan M, Graule T, Rekas M . 2013Spectroscopic assessment of the role of hydrogen in surface defects, in the electronic structure and transport properties of TiO2, ZnO and SnO2 nanoparticles. Phys. Chem. Chem. Phys. 15, 1417–1430. (doi:10.1039/C2CP42601C) Crossref, PubMed, ISI, Google Scholar - 4
Kim NH, Choi SJ, Yang DJ, Bae J, Park J, Kim ID . 2014Highly sensitive and selective hydrogen sulfide and toluene sensors using Pd functionalized WO3 nanofibers for potential diagnosis of halitosis and lung cancer. Sens. Actuat. B Chem. 193, 574–581. (doi:10.1016/j.snb.201312011) Crossref, ISI, Google Scholar - 5
Katoch A, Choi SW, Sun GJ, Kim SS . 2013An approach to detecting a reducing gas by radial modulation of electron depleted shells in core shell nanofiber. J. Mater. Chem. A 43, 13 588–13 596. (doi:10.1039/C3TA13087H) Crossref, ISI, Google Scholar - 6
Katoch A, Sun GJ, Choi SW, Hishita S, Kulish VV, Wu P, Kim SS . 2014Acceptor compensated charge transport and surface chemical reactions in Au-implanted SnO2 nanowires. Sci. Rep. 4, 4622–4629. (doi:10.1038/srep04622) Crossref, PubMed, ISI, Google Scholar - 7
Wan GX, Ma SY, Li XB, Li FM, Bian HQ, Zhang LP, Li WQ . 2014Synthesis and acetone sensing properties of Ce-doped ZnO nanofibers. Mater. Lett. 114, 103–106. (doi:10.1016/j.matlet.201309094) Crossref, ISI, Google Scholar - 8
Mani GK, Rayappan JBB . 2015A highly selective and wide range ammonia sensor—nanostructured ZnO: Co thin film. Mater. Sci. Eng. B 191, 41–50. (doi:10.1016/j.mseb.2014.10.007) Crossref, ISI, Google Scholar - 9
Fu YM, Zhao YY, Wang PL, Xing LL, Xue XY . 2015High response and selectivity of a Cu–ZnO nanowire nanogenerator as a self-powered/active H2S sensor. Phys. Chem. Chem. Phys. 17, 2121–2126. (doi:10.1039/C4CP04983G) Crossref, PubMed, ISI, Google Scholar - 10
Tabassum R, Mishra SK, Gupta BD . 2013Surface plasmon resonance-based fiber optic hydrogen sulphide gas sensor utilizing Cu–ZnO thin films. Phys. Chem. Chem. Phys. 15, 11 868–11 874. (doi:10.1039/C3CP51525G) Crossref, ISI, Google Scholar - 11
Cai XY, Hu D, Deng SJ, Han BQ, Wang Y, Wu JM, Wang YD . 2014Isopropanol sensing properties of coral-like ZnO–CdO composites by flash preparation via self-sustained decomposition of metal–organic complexes. Sens. Actuat. B Chem. 198, 402–410. (doi:10.1016/j.snb.201403093) Crossref, ISI, Google Scholar - 12
Kaneti YV, Yue J, Jiang X, Yu A . 2013Controllable synthesis of ZnO nanoflakes with exposed (1010) for enhanced gas sensing performance. J. Phys. Chem. C 117, 13 153–13 162. (doi:10.1021/jp404329q) Crossref, ISI, Google Scholar - 13
Park SH, An S, Ko HS, Jin CY, Lee CM . 2012Synthesis of nanograined ZnO nanowires and their enhanced gas sensing properties. ACS Appl. Mater. Interfaces 4, 3650–3656. (doi:10.1021/am300741r) Crossref, PubMed, ISI, Google Scholar - 14
Huang JR, Wu YJ, Gun CP, Zhai MH, Yu K, Yang M, Liu JH . 2010Preferential growth of long ZnO nanowires and its application in gas sensor. Sens. Actuat. B Chem. 146, 206–212. (doi:10.1016/j.snb.201211044) Crossref, ISI, Google Scholar - 15
Wang LW, Wang SR, Zhang HX, Wang YH, Yang JD, Huang WP . 2014Au-functionalized porous ZnO microsheets and their enhanced gas sensing properties. New J. Chem. 38, 2530–2537. (doi:10.1039/C3NJ01562A) Crossref, ISI, Google Scholar - 16
Kaneti YV, Zakaria QMD, Zhang Z, Chen C, Yue J, Liu M, Jiang X, Yu A . 2014Solvothermal synthesis of ZnO-decorated α-Fe2O3 nanorods with highly enhanced gas-sensing performance toward n-butanol. J. Mater. Chem. A 2, 13 283–13 292. (doi:10.1039/C4TA01837K) Crossref, ISI, Google Scholar - 17
Mashock M, Yu KH, Cui SM, Mao S, Lu GH, Chen JH . 2012Modulating gas sensing properties of CuO nanowires through creation of discrete nanosized p–n junctions on their surfaces. ACS Appl. Mater. Interfaces 4, 4192–4199. (doi:10.1021/am300911z) Crossref, PubMed, ISI, Google Scholar - 18
Kim JY, Kim WS, Yong KJ . 2012CuO/ZnO heterostructured nanorods: photochemical synthesis and the mechanism of H2S gas sensing. J. Phys. Chem. C 116, 15 682–15 691. (doi:10.1021/jp302129j) Crossref, ISI, Google Scholar - 19
Sun GJ, Choi SW, Katoch A, Wu P, Kim SS . 2013Bi-functional mechanism of H2S detection using CuO–SnO2 nanowires. J. Mater. Chem. C 35, 5454–5462. (doi:10.1039/C3TC30987H) Crossref, ISI, Google Scholar - 20
Park S, Park S, Jung J, Hong T, Lee S, Kim HW, Lee C . 2014H2S gas sensing properties of CuO-functionalized WO3 nanowires. Ceram. Int. 40, 11 051–11 056. (doi:10.1016/j.ceramint.201403120) Crossref, ISI, Google Scholar - 21
Wang JX, Sun XW, Yang Y, Kyaw KKA, Huang XY, Yin JZ, Wei J, Demir HV . 2011Free-standing ZnO–CuO composite nanowire array films and their gas sensing properties. Nanotechnology 22, 325704. (doi:10.1088/0957-4484/22/32/325704) Crossref, PubMed, ISI, Google Scholar - 22
Rai P, Jeon SH, Lee CH, Lee JH, Yu YT . 2014Functionalization of ZnO nanorods by CuO nanospikes for gas sensor applications. RSC Adv. 4, 23604–23609. (doi:10.1039/c4ra00078a) Crossref, ISI, Google Scholar - 23
Rahman MM, Asiri AM . 2015Development of selective and sensitive bicarbonate chemical sensor based on wet-chemically prepared CuO-ZnO nanorods. Sens. Actuat. B Chem. 214, 82–91. (doi:10.1016/j.snb.2015.02.113) Crossref, ISI, Google Scholar - 24
Kannan PK, Late DJ, Morgan H, Rout CS . 2015Recent developments in 2D layered inorganic nanomaterials for sensing. Nanoscale 7, 13293–13312. (doi:10.1039/C5NR03633J) Crossref, PubMed, ISI, Google Scholar - 25
Late DJ 2013Sensing behavior of atomically thin-layered MoS2 transistors. ACS Nano 7, 4879–4891. (doi:10.1021/nn400026u) Crossref, PubMed, ISI, Google Scholar - 26
Late DJ, Kanawade RV, Kannan PK, Rout CS . 2016Atomically thin WS2 nanosheets based gas sensor. Sens. Lett. 14, 1249–1254. (doi:10.1166/sl.2016.3764) Crossref, Google Scholar - 27
Pawbake AS, Waykar RG, Late DJ, Jadkar SR . 2016Highly transparent wafer-scale synthesis of crystalline WS2 nanoparticle thin film for photodetector and humidity-sensing applications. ACS Appl. Mater. Interfaces 8, 3359–3365. (doi:10.1021/acsami.5b11325) Crossref, PubMed, ISI, Google Scholar - 28
Late DJ, Doneux T, Bougouma M . 2014Single-layer MoSe2 based NH3 gas sensor. Appl. Phys. Lett. 105, 233103. (doi:10.1063/1.4903358) Crossref, ISI, Google Scholar - 29
Pawar M, Kadam S, Late DJ . 2017High-performance sensing behavior using electronic ink of 2D SnSe2 nanosheets. Chem. Select 2, 4068–4075. (doi:10.1002/slct.201700261) Google Scholar - 30
Erande MB, Pawar MS, Late DJ . 2016Humidity sensing and photo detection behavior of electrochemically exfoliated atomically thin-layered black phosphorus nanosheets. ACS Appl. Mater. Interfaces 8, 11548–11556. (doi:10.1021/acsami.5b10247) Crossref, PubMed, ISI, Google Scholar - 31
Late DJ . 2016Liquid exfoliation of black phosphorus nanosheets and its application as humidity sensor. Microporous Mesoporous Mater. 225, 494–503. (doi:10.1016/j.micromeso.201601031) Crossref, ISI, Google Scholar - 32
Li J, Fan HQ, Jia XH . 2010Multilayered ZnO nanosheets with 3D porous architectures: synthesis and gas sensing application. J. Phys. Chem. C 114, 14 684–14 691. (doi:10.1021/jp100792c) Crossref, ISI, Google Scholar - 33
Liu XH, Zhang J, Wang LW, Yang TL, Guo XZ, Wu SH, Wang SR . 20113D hierarchically porous ZnO structures and their functionalization by Au nanoparticles for gas sensors. J. Mater. Chem. 21, 349–356. (doi:10.1039/C0JM01800G) Crossref, Google Scholar - 34
Wang XZ, Liu W, Liu JR, Wang FL, Kong J, Qiu S, He CZ, Luan LQ . 2012Synthesis of nestlike ZnO hierarchically porous structures and analysis of their gas sensing properties. ACS Appl. Mater. Interfaces 4, 817–825. (doi:10.1021/am201476b) Crossref, PubMed, ISI, Google Scholar - 35
Liu JY, Guo Z, Meng FL, Luo T, Li MQ, Liu JH . 2009Novel porous single-crystalline ZnO nanosheets fabricated by annealing ZnS(en)0.5 (en=ethylenediamine) precursor. Application in a gas sensor for indoor air contaminant detection. Nanotechnology 20, 125 501–125 508. (doi:10.1088/0957-4484/20/12/125501) Crossref, ISI, Google Scholar - 36
Huang HW, Liu J, He GF, Peng Y, Wu M, Zheng WH, Chen LH, Li Y, Su BL . 2015Tunable macro-mesoporous ZnO nanostructures for high sensitive ethanol and acetone gas sensors. RSC Adv. 5, 101 910–101 916. (doi:10.1039/C5RA20508E) Crossref, ISI, Google Scholar - 37
Chen XS, Liu JY, Jing XY, Wang J, Song DL, Liu LH . 2013Self-assembly of ZnO nanosheets into flower-like architectures and their gas sensing properties. Mater. Lett. 112, 23–25. (doi:10.1016/j.matlet.201308118) Crossref, ISI, Google Scholar - 38
Xu S, Gao J, Wang L, Kan K, Xie Y, Shen PK, Li L, Shi K . 2015Role of the heterojunctions in In2O3-composited SnO2 nanorods sensor and their remarkable gas-sensing performance for NOx at room temperature. Nanoscale 7, 14 643–14 651. (doi:10.1039/C5NR03796D) Crossref, ISI, Google Scholar - 39
Yang Y, Tian CG, Wang JC, Sun L, Shi KY, Zhou W, Fu HG . 2014Facile synthesis of novel 3D nanoflower-like CuxO/ multilayer graphene composites for room temperature NOx gas sensor application. Nanoscale 6, 7369–7378. (doi:10.1039/c4nr00196f) Crossref, PubMed, ISI, Google Scholar - 40
Yang Y, Sun L, Dong XT, Yu H, Wang TT, Wang J, Yu W, Liu GX . 2016Fe3O4/rGO nanocomposite: synthesis and enhanced NOx gas-sensing properties at room temperature. RSC Adv. 6, 37 085–37 092. (doi:10.1039/C6RA02306A) Crossref, ISI, Google Scholar - 41
Min JH, Liang XY, Wang B, Wang LJ, Zhao Y, Shi WM, Xia YB . 2011The sensitivity and dynamic response of field ionization gas sensor based on ZnO nanorods. J. Nanoparticle Res. 13, 5171–5176. (doi:10.1007/s11051-011-0500-2) Crossref, ISI, Google Scholar - 42
Ahmad MZ, Chang J, Ahmad MS, Waclawik ER, Wlodarski W . 2012Non-aqueous synthesis of hexagonal ZnO nanopyramids: gas sensing properties. Sens. Actuat. B Chem. 177, 286–294. (doi:10.1016/j.snb.2012.11.013) Crossref, ISI, Google Scholar - 43
Sun L 2017Highly active and porous single-crystal In2O3 nanosheet for NOx gas sensor with excellent response at room temperature. RSC Adv. 7, 33 419–33 425. (doi:10.1039/c7ra05446g) Crossref, ISI, Google Scholar - 44
Liu Y, Yao S, Yang QY, Sun P, Gao Y, Liang XS, Liu FM, Lu GY . 2015Highly sensitive and humidity-independent ethanol sensors based on In2O3 nanoflower/SnO2 nanoparticle composites. RSC Adv. 5, 52 252–52 258. (doi:10.1039/C5RA07213A) Crossref, ISI, Google Scholar - 45
Li YX, Deng DY, Xing XX, Chen N, Liu X, Xiao XC, Wang YD . 2016A high performance methanol gas sensor based on palladium-platinum-In2O3 composited nanocrystalline SnO2. Sens. Actuat. B 237, 133–141. (doi:10.1016/j.snb.201606088) Crossref, ISI, Google Scholar - 46
Yamazoe N, Fuchigami J, Kishikawa M, Seiyama T . 1979Interactions of tin oxide surface with O2, H2O and H2. Surf. Sci. 86, 335–344. (doi:10.1016/0039-6028(79)90411-4) Crossref, ISI, Google Scholar - 47
Hua ZQ, Wang Y, Wang HQ, Dong L . 2010NO2 sensing properties of WO3 varistor-type gas sensor. Sens. Actuat. B 150, 588–593. (doi:10.1016/j.snb.2010.08.035) Crossref, ISI, Google Scholar - 48
Gao F, Qin GH, Li YH, Jiang QP, Luo L, Zhao K, Liu YJ, Zhao HY . 2016One-pot synthesis of La-doped SnO2 layered nanoarrays with an enhanced gas-sensing performance toward acetone. RSC Adv. 6, 10 298–10 310. (doi:10.1039/C5RA27270J) Crossref, ISI, Google Scholar - 49
Pisarev RV, Pavlov VV, Kalashnikova AM, Moskvin AS . 2010Near-band gap electronic structure of the tetragonal rare-earth cuprates R2CuO4 and the bismuth cuprate Bi2CuO4. Phys. Rev. B 82, 224502. (doi:10.1103/PhysRevB.82.224502) Crossref, ISI, Google Scholar - 50
Yamazoe N, Sakai G, Shimanoe K . 2003Oxide semiconductor gas sensors. Catal. Surv. Asia 7, 63–75. (doi:10.1023/A:1023436725457) Crossref, ISI, Google Scholar - 51
Morrison SR . 1987Selectivity in semiconductor gas sensors. Sens. Actuat. 12, 425–440. (doi:10.1016/0250-6874(87)80061-6) Crossref, ISI, Google Scholar - 52
Iwamoto M, Yoda Y, Yamazoe N, Seiyama T . 1978Study of metal oxide catalysts by temperature programmed desorption 4: oxygen adsorption on various metal oxides. J. Phys. Chem. 82, 2564–2570. (doi:10.1002/chin.197909024) Crossref, ISI, Google Scholar - 53
Guo Z, Zhao D, Liu Y, Shen D, Zhang J, Li B . 2008Visible and ultraviolet light alternative photodetector based on ZnO nanowire/n-Si heterojunction. Appl. Phys. Lett. 93, 163501. (doi:10.1063/1.3003877) Crossref, ISI, Google Scholar - 54
Bao Q 2009Electrical transport and photovoltaic effects of core-shell CuO/C60 nanowire heterostructure. Nanotechnology 20, 2643–2646. (doi:10.1088/0957-4484/20/6/065203) Crossref, ISI, Google Scholar - 55
Hu Z, Xu M, Shen Z, Yu JC . 2015A nanostructured chromium (III) oxide/ tungsten (VI) oxide p-n junction photoanode toward enhanced faradaic efficiency for water oxidation. J. Mater. Chem. A 3, 14 046–14 053. (doi:10.1039/x0xx00000x) Crossref, ISI, Google Scholar - 56
Kim HJ, Lee JH . 2014Highly sensitive, selective gas sensors using p-type oxide semiconductors: overview. Sens. Actuat. B Chem. 192, 607–627. (doi:10.1016/j.snb.2013.11.005) Crossref, ISI, Google Scholar - 57
Woo H-S, Na CW, Kim I-D, Lee J-H . 2012Highly sensitive and selective trimethy-lamine sensor using one-dimensional ZnO-Cr2O3 hetero-nanostructures. Nanotechnology 23, 245501. (doi:10.1088/0957-4484/23/24/245501) Crossref, PubMed, ISI, Google Scholar - 58
Shao F 2013Heterostructured p-CuO (nanoparticle)/n-SnO2 (nanowire) devices for selective H2S detection. Sens. Actuat. B Chem. 181, 130–135. (doi:10.1016/j.snb.201301067) Crossref, ISI, Google Scholar - 59
Zhang YB, Yin J, Li L, Zhang LX, Bie LJ . 2014Enhanced ethanol gas-sensing properties of flower-like p-CuO/n-ZnO heterojunction nanorods. Sens. Actuat. B Chem. 202, 500–507. (doi:10.1016/j.snb.201405111) Crossref, ISI, Google Scholar - 60
Chen Y, Shen ZR, Jia QQ, Zhao J, Zhao Z, Ji HM . 2015A CuO-ZnO nanostructured p-n junction sensor for enhanced N-butanol detection. RSC Adv. 6, 2504–2511. (doi:10.1039/C5RA20031H) Crossref, ISI, Google Scholar - 61
Jia QQ, Ji HM, Wang DH, Bai X, Sun XH, Jin ZG . 2014Exposed facets induced enhanced acetone selective sensing property of nanostructured tungsten oxide. J. Mater. Chem. A 2, 13 602–13 611. (doi:10.1039/C4TA01930J) Crossref, ISI, Google Scholar - 62
Jia QQ, Ji HM, Zhang Y, Chen YL, Sun XH, Jin ZG . 2014Rapid and selective detection of acetone using hierarchical ZnO gas sensor for hazardous odor markers application. J. Hazard. Mater. 276, 262–270. (doi:10.1016/j.jhazmat.201405044) Crossref, PubMed, ISI, Google Scholar - 63
Gou X, Wang G, Park J, Liu H, Yang J . 2008Monodisperse hematite porous nanospheres: synthesis, characterization, and applications for gas sensors. Nanotechnology 19, 125 606-1–125 606-7. (doi:10.1088/0957-4484/19/12/125606) Crossref, ISI, Google Scholar - 64
Jiang S, Gui Z, Chen G, Liang D, Alam J . 2015Ultrathin nanosheets of organic-modified β-Ni(OH)2 with excellent thermal stability: fabrication and its reinforcement application in polymers. ACS Appl. Mater. Interfaces 7, 14 603–14 613. (doi:10.1021/acsami.5b04142) Crossref, ISI, Google Scholar - 65
Liu JY, Li X, Chen X, Niu H, Han X, Zhang T, Lin HM, Qu FY . 2016Synthesis of SnO2/In2O3 hetero-nanotubes by coaxial-electrospinning method for enhanced formaldehyde response. New J. Chem. 40, 1756–1764. (doi:10.1039/C5NJ02337H) Crossref, ISI, Google Scholar - 66
Zheng ZQ, Zhu LF, Wang B . 2015In2O3 nanotower hydrogen gas sensors based on both Schottky junction and thermoelectronic emission. Nanoscale Res. Lett. 10, 293–306. (doi:10.1186/s11671-015-1002-4) Crossref, ISI, Google Scholar - 67
Du HY, Wang J, Sun YH, Yao PJ, Li XG, Yu NS . 2015Investigation of gas sensing properties of SnO2/In2O3 composite hetero-nanofibers treated by oxygen plasma. Sens. Actuat. B Chem. 206, 753–763. (doi:10.1016/j.snb.201409010) Crossref, ISI, Google Scholar - 68
Liu H, Wu SX, Gong SP, Zhao J, Liu JQ, Zhou DX . 2011Nanocrystalline In2O3-SnO2 thick films for low temperature hydrogen sulfide detection. Ceram. Int. 37, 1889–1894. (doi:10.1016/j.ceramint.201102005) Crossref, ISI, Google Scholar - 69
Dong CJ, Liu X, Xiao XC, Chen G, Wang YD, Djerdj I . 2014Combustion synthesis of porous Pt-functionalized SnO2 sheets for isopropanol gas detection with a significant enhancement in response. J. Mater. Chem. A 2, 20 089–20 095. (doi:10.1039/C4TA04251D) Crossref, ISI, Google Scholar - 70
Trung DD, Hoa ND, Van Tong P, Van Duy N, Dao TD, Chung HV, Nagao T, Van Hieu N . 2014Effective decoration of Pd nanoparticles on the surface of SnO2 nanowires for enhancement of CO gas-sensing performance. J. Hazard. Mater. 265, 124–132. (doi:10.1016/j.jhazmat.201311054) Crossref, PubMed, ISI, Google Scholar - 71
Xu S, Gao J, Wang LL, Kan K, Xie Y, Shen PK, Li L, Shi KY . 2015Role of the heterojunctions in In2O3-composite SnO2 nanorod sensors and their remarkable gas-sensing performance for NOx at room temperature. Nanoscale 7, 14 643–14 651. (doi:10.1039/c5nr03796d) Crossref, ISI, Google Scholar




